Whispering Gallery Mode Resonances from Ge Micro-Disks on Suspended Beams

نویسندگان

  • Abdelrahman Zaher Al-Attili
  • Satoshi Kako
  • Muhammad K. Husain
  • Frederic Y. Gardes
  • Naoki Higashitarumizu
  • Satoshi Iwamoto
  • Yasuhiko Arakawa
  • Yasuhiko Ishikawa
  • Hideo Arimoto
  • Katsuya Oda
  • Tatemi Ido
  • Shinichi Saito
چکیده

2 Ge is considered to be one of the most promising materials for realizing full monolithic integra3 tion of a light source on a silicon (Si) photonic chip. Tensile-strain is required to convert Ge into an 4 optical gain material and to reduce the pumping required for population inversion. Several meth5 ods of strain application to Ge are proposed in literature, of which the use of free-standing beams 6 fabricated by micro-electro-mechanical systems (MEMS) processes are capable of delivering 7 very high strain values. However, it is challenging to make an optical cavity within free-standing 8 Ge beams, and here, we demonstrate the fabrication of a simple cavity while imposing tensile 9 strain by suspension using Ge-On-Insulator (GOI) wafers. Ge micro-disks are made on top of 10 suspended SiO2 beams by partially removing the supporting Si substrate. According to Raman 11 spectroscopy, a slight tensile strain was applied to the Ge disks through the bending of the 12 SiO2 beams. Whispering-Gallery-Mode (WGM) resonances were observed from a disk with a 13 diameter of 3 μm, consistent with the finite-domain time-difference simulations. The quality (Q) 14 factor was 192, and upon increasing the pumping power, the Q-factor was degraded due to the 15 red-shift of Ge direct-gap absorption edge caused by heating. 16

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تاریخ انتشار 2015